Wafer Breaking 6-inch
Fully automatic breaking, the next generation.
- Standardized for 6-inch wafers
-Can also be used for wafers from 2 to 4 inches by changing the break blade and work table.
- Break detection function
-Eliminates secondary breaking errors.
- High efficiency wafer transport system
-Double-armed transport shortens wafer loading time.
- Accurate image recognition functions
-The clarity of the machine’s optical system reduces matching errors in image recognition.
Dimensions (width × depth × height) / weight
1516mm × 862mm × 1506mm / 650kg